Invention Grant
US07573019B2 Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method 有权
光检测装置,照明光学装置,曝光装置和曝光方法

  • Patent Title: Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method
  • Patent Title (中): 光检测装置,照明光学装置,曝光装置和曝光方法
  • Application No.: US11628052
    Application Date: 2005-06-06
  • Publication No.: US07573019B2
    Publication Date: 2009-08-11
  • Inventor: Motoo Koyama
  • Applicant: Motoo Koyama
  • Applicant Address: JP Tokyo
  • Assignee: Nikon Corporation
  • Current Assignee: Nikon Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff & Berridge, PLC
  • Priority: JP2004-180816 20040618
  • International Application: PCT/JP2005/010356 WO 20050606
  • International Announcement: WO2005/124831 WO 20051229
  • Main IPC: G02B5/30
  • IPC: G02B5/30
Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method
Abstract:
A light detecting apparatus which can be arranged even in an optical path of which converting angle is relatively large, and can accurately detect light entering along a predetermined direction in an optical path. The light detecting apparatus (10) for detecting light which enters in a predetermined direction in an optical path has a light splitting element (11) having two optical surfaces (11a, 11b) positioned in the optical path, and a photoelectric detector (12) for photo detecting light which propagates inside the light splitting element and which is guided from a side face (11c) of the light splitting element. The light splitting element further has an incident angle conversion section (13) for converting a part of light which enters one optical face of the light splitting element into light entering the other optical surface at an incident angle greater than or equal to a total reflection angle.
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