Invention Grant
- Patent Title: Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method
- Patent Title (中): 光检测装置,照明光学装置,曝光装置和曝光方法
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Application No.: US11628052Application Date: 2005-06-06
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Publication No.: US07573019B2Publication Date: 2009-08-11
- Inventor: Motoo Koyama
- Applicant: Motoo Koyama
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2004-180816 20040618
- International Application: PCT/JP2005/010356 WO 20050606
- International Announcement: WO2005/124831 WO 20051229
- Main IPC: G02B5/30
- IPC: G02B5/30

Abstract:
A light detecting apparatus which can be arranged even in an optical path of which converting angle is relatively large, and can accurately detect light entering along a predetermined direction in an optical path. The light detecting apparatus (10) for detecting light which enters in a predetermined direction in an optical path has a light splitting element (11) having two optical surfaces (11a, 11b) positioned in the optical path, and a photoelectric detector (12) for photo detecting light which propagates inside the light splitting element and which is guided from a side face (11c) of the light splitting element. The light splitting element further has an incident angle conversion section (13) for converting a part of light which enters one optical face of the light splitting element into light entering the other optical surface at an incident angle greater than or equal to a total reflection angle.
Public/Granted literature
- US20080042044A1 Light Detecting Apparatus, Illumination Optical Apparatus, Exposure Apparatus and Exposure Method Public/Granted day:2008-02-21
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