Invention Grant
- Patent Title: Bonded-wafer superjunction semiconductor device
- Patent Title (中): 粘结晶片超结半导体器件
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Application No.: US12191035Application Date: 2008-08-13
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Publication No.: US07579667B2Publication Date: 2009-08-25
- Inventor: Conor Brogan , Cormac MacNamara , Hugh J. Griffin , Robin Wilson
- Applicant: Conor Brogan , Cormac MacNamara , Hugh J. Griffin , Robin Wilson
- Applicant Address: GB Belfast, Northern Ireland
- Assignee: Icemos Technology Ltd.
- Current Assignee: Icemos Technology Ltd.
- Current Assignee Address: GB Belfast, Northern Ireland
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L21/44

Abstract:
A bonded-wafer semiconductor device includes a semiconductor substrate, a buried oxide layer disposed on a first main surface of the semiconductor substrate and a multi-layer device stack. The multi-layer device stack includes a first device layer of a first conductivity disposed on the buried oxide layer, a second device layer of a second conductivity disposed on the first device layer, a third device layer of the first conductivity disposed on the second device layer and a fourth device layer of the second conductivity disposed on the third device layer. A trench is formed in the multi-layer device stack. A mesa is defined by the trench. The mesa has first and second sidewalls. A first anode/cathode layer is disposed on a first sidewall of the multi-layer device stack, and a second anode/cathode layer is disposed on the second sidewall of the multi-layer device stack.
Public/Granted literature
- US20080315247A1 BONDED-WAFER SUPERJUNCTION SEMICONDUCTOR DEVICE Public/Granted day:2008-12-25
Information query
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