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US07633065B2 Conduction structure for infrared microbolometer sensors 失效
红外微测热传感器的传导结构

Conduction structure for infrared microbolometer sensors
Abstract:
A conduction structure for infrared microbolometer sensors and a method for sensing electromagnetic radiation may be provided. The microbolometer may include a first conductor layer and a second conductor layer. The microbolometer further may include a bolometer layer between the first conductor layer and the second conductor layer.
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