Invention Grant
US07640789B2 Ultra-sensitive metal oxide gas sensor and fabrication method thereof
有权
超敏感金属氧化物气体传感器及其制造方法
- Patent Title: Ultra-sensitive metal oxide gas sensor and fabrication method thereof
- Patent Title (中): 超敏感金属氧化物气体传感器及其制造方法
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Application No.: US11644121Application Date: 2006-12-22
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Publication No.: US07640789B2Publication Date: 2010-01-05
- Inventor: Il-Doo Kim , Jae-Min Hong , Dong-Young Kim , Seong-Mu Jo , Avner Rothschild , Harry L. Tuller
- Applicant: Il-Doo Kim , Jae-Min Hong , Dong-Young Kim , Seong-Mu Jo , Avner Rothschild , Harry L. Tuller
- Applicant Address: KR
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR
- Agency: Darby & Darby P.C.
- Agent S. Peter Ludwig
- Priority: KR10-2005-0129096 20051223; KR10-2006-0113002 20061115
- Main IPC: G01N27/26
- IPC: G01N27/26 ; B05D3/00

Abstract:
A method for fabricating an ultra-sensitive metal oxide gas sensor is disclosed, which comprises the steps of spinning a mixture solution including a metal oxide precursor and a polymer onto a sensor electrode to form a metal oxide precursor-polymer composite fiber; thermally compressing or thermally pressurizing the composite fiber; and thermally treating the thermally compressed or thermally pressurized composite fiber to remove the polymer from the composite fiber. Since the gas sensor includes a macro pore between nanofibers and a meso pore between nano-rods and/or nano-grains, gas diffusion and surface area can be maximized. Also, the ultra-sensitive sensor having high stability in view of mechanical, thermal, and electrical aspects can be obtained through rapid increase of adhesion between the metal oxide thin layer and the sensor electrode.
Public/Granted literature
- US20070261959A1 Ultra-sensitive metal oxide gas sensor and fabrication method thereof Public/Granted day:2007-11-15
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