Invention Grant
- Patent Title: Semiconductor Sensor
- Patent Title (中): 半导体传感器
-
Application No.: US11572384Application Date: 2005-07-07
-
Publication No.: US07640807B2Publication Date: 2010-01-05
- Inventor: Masahide Tamura , Masato Ando , Yuichi Ishikuro
- Applicant: Masahide Tamura , Masato Ando , Yuichi Ishikuro
- Applicant Address: JP Toyama-shi
- Assignee: Hokuriku Electric Industry Co., Ltd.
- Current Assignee: Hokuriku Electric Industry Co., Ltd.
- Current Assignee Address: JP Toyama-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2004-212891 20040721
- International Application: PCT/JP2005/013362 WO 20050707
- International Announcement: WO2006/009194 WO 20060126
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
A semiconductor sensor of the present invention is capable of preventing a diaphragm portion of the sensor from being damaged if a weight collides against a semiconductor integrated circuit substrate of the sensor and is further capable of preventing the diaphragm portion from being bent significantly even when a semiconductor sensor element of the sensor is disposed inside a distorted or deformed casing. A rear surface of the semiconductor integrated circuit substrate 7 is joined onto a wall surface of the casing 9 that defines a receiving chamber of the casing. A support portion of the semiconductor sensor element is joined onto a front surface 7a of the semiconductor integrated circuit substrate 7. A shock absorbing layer is formed on the front surface 7a of the semiconductor integrated circuit substrate 7 at least on a part thereof facing the weight 3 of the semiconductor sensor element 7, for suppressing the bouncing of the weight 3 when the weight 3 collides against the semiconductor integrated circuit substrate 7.
Public/Granted literature
- US20070234804A1 Semiconductor Sensor Public/Granted day:2007-10-11
Information query
IPC分类: