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US07641349B1 Systems and methods for collector mirror temperature control using direct contact heat transfer 有权
采用直接接触式传热的集光镜温度控制系统和方法

  • Patent Title: Systems and methods for collector mirror temperature control using direct contact heat transfer
  • Patent Title (中): 采用直接接触式传热的集光镜温度控制系统和方法
  • Application No.: US12284585
    Application Date: 2008-09-22
  • Publication No.: US07641349B1
    Publication Date: 2010-01-05
  • Inventor: Christopher P. Chrobak , Igor V. Fomenkov
  • Applicant: Christopher P. Chrobak , Igor V. Fomenkov
  • Applicant Address: US CA San Diego
  • Assignee: Cymer, Inc.
  • Current Assignee: Cymer, Inc.
  • Current Assignee Address: US CA San Diego
  • Agent Matthew K. Hillman
  • Main IPC: G02B5/08
  • IPC: G02B5/08
Systems and methods for collector mirror temperature control using direct contact heat transfer
Abstract:
As disclosed herein, a device may comprise an optic disposed in a near vacuum environment, the optic formed with a surface portion; a temperature controlled member formed with a surface portion conforming to the optic surface portion; and a liquid interposed between the optic surface portion and the member surface portion to conduct heat therebetween.
Abstract(Chinese):

如本文所公开的，设备可以包括设置在近真空环境中的光学元件，光学元件形成有表面部分; 形成有与光学表面部分相符的表面部分的温度控制部件; 以及介于光学表面部分和构件表面部分之间以在其间传导热量的液体。

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