Invention Grant
- Patent Title: Pulsation reducing apparatus and inspection apparatus
- Patent Title (中): 脉动减压装置及检查装置
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Application No.: US11488134Application Date: 2006-07-18
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Publication No.: US07641453B2Publication Date: 2010-01-05
- Inventor: Masataka Hatta
- Applicant: Masataka Hatta
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-208292 20050719; JP2006-120592 20060425
- Main IPC: F04B11/00
- IPC: F04B11/00

Abstract:
A pulsation reducing apparatus is used for an apparatus having a pump for circulating a liquid in a circulating line and a tank for storing the liquid circulating via the pump. The pulsation reducing apparatus includes a supplement tank for reserving the liquid such that a liquid surface height of the supplement tank is higher than that of the tank. The tank is connected to the supplement tank and the empty space portion of the tank is connected to the supplement tank via a gas exhaust line. When the empty space portion of the tank communicates with that of the supplement tank via the gas exhaust line due to a reduction of the liquid in the tank, the gas in the tank is exhausted to the empty space portion of the supplement tank via the gas exhaust line and the liquid in the supplement tank is supplemented into the tank.
Public/Granted literature
- US20070031274A1 Pulsation reducing apparatus and inspection apparatus Public/Granted day:2007-02-08
Information query