Invention Grant
US07641872B2 Apparatus for producing trichlorosilane 有权
三氯硅烷生产设备

Apparatus for producing trichlorosilane
Abstract:
In the apparatus for producing trichlorosilane in which metal silicon powder supplied into the reactor is reacted with hydrogen chloride gas while being fluidized by the gas, thereby taking out trichlorosilane generated by the reaction from the upper part of the reactor, and a plurality of gas flow controlling members are installed at the internal space of the reactor along the vertical direction.
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