Invention Grant
- Patent Title: Method of making a bipolar junction transistor
- Patent Title (中): 制造双极结型晶体管的方法
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Application No.: US11615741Application Date: 2006-12-22
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Publication No.: US07642169B2Publication Date: 2010-01-05
- Inventor: Kwang Young Ko
- Applicant: Kwang Young Ko
- Applicant Address: KR Seoul
- Assignee: Dongbu HiTek, Ltd.
- Current Assignee: Dongbu HiTek, Ltd.
- Current Assignee Address: KR Seoul
- Agency: Sherr & Vaughn, PLLC
- Priority: KR10-2005-0134780 20051230
- Main IPC: H01L21/331
- IPC: H01L21/331

Abstract:
Embodiments relate to a bipolar junction transistor and a method for manufacturing the same. An oxide pattern may be formed on a P type semiconductor substrate. A low-density N type collector area may be formed in the semiconductor substrate. First spacers may be formed at sidewalls of the oxide pattern, and a low-density P type base area may be formed in the semiconductor substrate. Second spacers may be formed on sidewalls of the first spacers. A high-density N type emitter area may be formed in the low-density P type base area between the second spacers, and a high-density N type collector area may be formed in the semiconductor substrate at an outside of the first spacers. The bipolar junction transistor may be realized through a self-aligned scheme using dual nitride spacers. A base width between the emitter area and the low-density collector area may be narrowed by the width of the second spacer.
Public/Granted literature
- US20070158677A1 BIPOLAR JUNCTION TRANSISTOR Public/Granted day:2007-07-12
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