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US07642576B2 Rotational MEMS device having piezo-resistor sensor 失效
具有压电阻传感器的旋转MEMS器件

Rotational MEMS device having piezo-resistor sensor
Abstract:
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.
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