Invention Grant
- Patent Title: Rotational MEMS device having piezo-resistor sensor
- Patent Title (中): 具有压电阻传感器的旋转MEMS器件
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Application No.: US11858183Application Date: 2007-09-20
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Publication No.: US07642576B2Publication Date: 2010-01-05
- Inventor: Young-chul Ko , Jin-woo Cho , U-hyuk Choi , Seong-ho Shin
- Applicant: Young-chul Ko , Jin-woo Cho , U-hyuk Choi , Seong-ho Shin
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd
- Current Assignee: Samsung Electro-Mechanics Co., Ltd
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2007-0004415 20070115
- Main IPC: H01C7/10
- IPC: H01C7/10

Abstract:
A rotational micro-electromechanical system (MEMS) having a piezo-resistor sensor is provided. The rotational MEMS device includes a pair of torsion springs that support a stage, four resistors, at least one of the resistors being formed along a center axis of the torsion springs, and electrical signal cables connected to the four resistors, wherein at least one of the torsion springs is formed in a direction on an n-type silicon substrate having a (100) plane, and the resistors formed on the at least one of the torsion springs are formed in a group direction.
Public/Granted literature
- US20080168670A1 ROTATIONAL MEMS DEVICE HAVING PIEZO-RESISTOR SENSOR Public/Granted day:2008-07-17
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