Invention Grant
- Patent Title: Integrated memory cell array
- Patent Title (中): 集成存储单元阵列
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Application No.: US11517634Application Date: 2006-09-08
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Publication No.: US07642586B2Publication Date: 2010-01-05
- Inventor: Rolf Weis
- Applicant: Rolf Weis
- Applicant Address: DE Munich
- Assignee: Qimonda AG
- Current Assignee: Qimonda AG
- Current Assignee Address: DE Munich
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
The present invention provides an integrated memory cell array comprising: a semiconductor substrate; a plurality of cell transistor devices including: a pillar formed in said semiconductor substrate; a gate trench surrounding said pillar; a first source/drain region formed in an upper region of said pillar; a gate dielectric formed on the bottom of said gate trench and surrounding a lower region of said pillar; a gate formed on said gate dielectric in said gate trench and surrounding a lower region of said pillar; and a second source/drain region formed in an upper region of said semiconductor substrate adjoining said gate trench; a plurality of bitlines being connected to respective first groups of first source/drain regions of said cell transistor devices; a plurality of wordlines connecting the respective gates of second groups said cell transistor devices; and a plurality of cell capacitor devices being connected to the second source/drain regions of said cell transistor devices.
Public/Granted literature
- US20080061337A1 Integrated memory cell array Public/Granted day:2008-03-13
Information query
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