Invention Grant
- Patent Title: Transistor gate electrode having conductor material layer
- Patent Title (中): 具有导体材料层的晶体管栅电极
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Application No.: US11715703Application Date: 2007-03-08
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Publication No.: US07642610B2Publication Date: 2010-01-05
- Inventor: Anand Murthy , Boyan Boyanov , Suman Datta , Brian S. Doyle , Been-Yih Jin , Shaofeng Yu , Robert Chau
- Applicant: Anand Murthy , Boyan Boyanov , Suman Datta , Brian S. Doyle , Been-Yih Jin , Shaofeng Yu , Robert Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff Taylor & Zafman LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material.
Public/Granted literature
- US20070170464A1 Transistor gate electrode having conductor material layer Public/Granted day:2007-07-26
Information query
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