Invention Grant
- Patent Title: Solid-state imaging device and method for manufacturing the same
- Patent Title (中): 固态成像装置及其制造方法
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Application No.: US11677301Application Date: 2007-02-21
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Publication No.: US07642614B2Publication Date: 2010-01-05
- Inventor: Kiyoshi Hirata
- Applicant: Kiyoshi Hirata
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sonnenschein Nath & Rosenthal LLP
- Priority: JPP2002-330150 20021114
- Main IPC: H01L31/042
- IPC: H01L31/042

Abstract:
Channel stop sections are formed by multiple times of impurity ion implanting processes. Four-layer impurity regions are formed across the depth of a semiconductor substrate (across the depth of the bulk), so that a P-type impurity region is formed deep in the semiconductor substrate; thus, incorrect movement of electric charges is prevented. Other four-layer impurity regions of another channel stop section are decreased in width step by step across the depth of the substrate, so that the reduction of a charge storage region of a light receiving section due to the dispersion of P-type impurity in the channel stop section is prevented in the depth of the substrate.
Public/Granted literature
- US20070131978A1 Solid-state imaging device and method for manufacturing the same Public/Granted day:2007-06-14
Information query
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