Invention Grant
- Patent Title: PZT MEMS resonant Lorentz force magnetometer
- Patent Title (中): PZT MEMS谐振洛伦兹力磁力计
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Application No.: US11226377Application Date: 2005-09-15
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Publication No.: US07642692B1Publication Date: 2010-01-05
- Inventor: Jeffrey S. Pulskamp
- Applicant: Jeffrey S. Pulskamp
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee Address: US DC Washington
- Agent Edward L. Stolarun; A. David Spevack; Alan Ivan Kalb
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A MEMS magnetometer comprises a deflectable resonator comprising a base layer; a Lorentz force (LF) drive conductor attached to the base layer; and a piezoelectric sensor attached to the base layer and electrically isolated from the LF drive conductor. The LF drive conductor comprises conductive material configured for receiving a current at a mechanical resonant frequency of the device capable of causing mechanical deformation of the deflectable resonator, wherein the current causes formation of Lorentz forces in a presence of a magnetic field, and wherein the deflectable resonator is mechanically deformed as a result of the formation of the Lorentz forces. The mechanical deformation of the deflectable resonator generates a detectable piezoelectric electrical signal that is proportional to the magnitude of the magnetic field.
Information query
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