Invention Grant
- Patent Title: Probe card needle cleaning frequency optimization
- Patent Title (中): 探针针针清洗频率优化
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Application No.: US10542278Application Date: 2003-02-05
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Publication No.: US07642798B2Publication Date: 2010-01-05
- Inventor: Beng Ghee Tan
- Applicant: Beng Ghee Tan
- Applicant Address: SG Singapore
- Assignee: Systems on Silicon Manufacturing Co. Pte. Ltd.
- Current Assignee: Systems on Silicon Manufacturing Co. Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Harness, Dickey & Pierce, P.L.C.
- International Application: PCT/SG03/00023 WO 20030205
- International Announcement: WO2004/070405 WO 20040819
- Main IPC: G01R31/26
- IPC: G01R31/26
Abstract:
A system and method for optimizing cleaning of a probe card including using the probe card to test the functionality of dies on a wafer, when a die fails the probe test, and the probe reports failure to contact the pads of the die, checking the resistance of the probe needles, and if the resistance of a probe needle is greater than a predetermined value triggering probe needle cleaning.
Public/Granted literature
- US20060144423A1 Probe card needle cleaning frequency optimization Public/Granted day:2006-07-06
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