Invention Grant
US07643146B2 Methods and apparatus for reducing noise in scatterometry measurements
有权
用于降低散射测量中噪声的方法和装置
- Patent Title: Methods and apparatus for reducing noise in scatterometry measurements
- Patent Title (中): 用于降低散射测量中噪声的方法和装置
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Application No.: US11336388Application Date: 2006-01-20
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Publication No.: US07643146B2Publication Date: 2010-01-05
- Inventor: Evan F. Cromwell , Steven C. Miller , Robert T. Trujillo , Paul B. Comita
- Applicant: Evan F. Cromwell , Steven C. Miller , Robert T. Trujillo , Paul B. Comita
- Applicant Address: US CA Sunnyvale
- Assignee: Blueshift Biotechnologies, Inc.
- Current Assignee: Blueshift Biotechnologies, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: G01N21/47
- IPC: G01N21/47

Abstract:
Methods and apparatus for performing scatterometry measurements of biological samples as described herein. A substrate having formed therein one or more sample wells is provided. Each sample well is configured to hold a sample solution containing objects that are to be characterized based on their light scattering properties. One or more sample solutions are dispensed into the sample wells. A specular reflection reducing element is applied to at least some of the sample solutions in the sample wells to decrease reflections of light into one or more detectors. A light beam is directed from a light source onto the objects in the sample wells. Light scattered by the objects in the sample wells is collected and transmitted to one or more detectors. The signal from the detectors is analyzed to detect the one or more characteristics of the one or more samples.
Public/Granted literature
- US20070171417A1 Methods and apparatus for reducing noise in scatterometry measurements Public/Granted day:2007-07-26
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