Invention Grant
- Patent Title: Optical image measurement device
- Patent Title (中): 光学图像测量装置
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Application No.: US11961195Application Date: 2007-12-20
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Publication No.: US07643154B2Publication Date: 2010-01-05
- Inventor: Tsutomu Kikawa , Hiroaki Okada , Takefumi Hayashi , Hisashi Tsukada , Yasufumi Fukuma
- Applicant: Tsutomu Kikawa , Hiroaki Okada , Takefumi Hayashi , Hisashi Tsukada , Yasufumi Fukuma
- Applicant Address: JP Itabashi-ku
- Assignee: Kabushiki Kaisha Topcon
- Current Assignee: Kabushiki Kaisha Topcon
- Current Assignee Address: JP Itabashi-ku
- Agency: Edwards Angell Palmer & Dodge LLP
- Priority: JP2006-349880 20061226
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
An optical image measurement device comprises: a light source configured to emit a low-coherence light; an interference-light generator configured to generate an interference light, by splitting the low-coherence light into a signal light and a reference light, and superimposing the signal light passed through a measurement object and the reference light passed through a reference object; a changer configured to change a difference in optical path length; a detector configured to detect the interference light; an image forming part configured to form an image of the measurement object within a predetermined frame based on the result of the detection; an analyzer configured to analyze the image, and specify a position of the image within the frame; and a controller configured to control the changer based on the specified position to change the difference so that an image newly formed is placed in a predetermined position within the frame.
Public/Granted literature
- US20080151256A1 OPTICAL IMAGE MEASUREMENT DEVICE Public/Granted day:2008-06-26
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