Invention Grant
- Patent Title: Partially coherent illumination for inverse scattering full-field interferometric synthetic aperture microscopy
- Patent Title (中): 反向散射全场干涉合成孔径显微镜的部分相干照明
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Application No.: US12131390Application Date: 2008-06-02
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Publication No.: US07643155B2Publication Date: 2010-01-05
- Inventor: Daniel L. Marks , Brynmor J. Davis , Stephen A. Boppart , Paul Scott Carney
- Applicant: Daniel L. Marks , Brynmor J. Davis , Stephen A. Boppart , Paul Scott Carney
- Applicant Address: US IL Urbana
- Assignee: The Board of Trustees of the University of Illinois
- Current Assignee: The Board of Trustees of the University of Illinois
- Current Assignee Address: US IL Urbana
- Agency: Sunstein Kann Murphy & Timbers LLP
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
Methods and apparatus for three-dimensional imaging of a sample. A source is provided of a beam of light characterized by partial spatial coherence. The beam is focused onto a sample and scattered light from the sample is superposed with a reference beam derived from the source onto a focal plane detector array to provide an interference signal. A forward scattering model is derived relating measurement data to structure of an object to allow solutions of an inverse scattering problem, based upon the interference signal so that a three-dimensional structure of the same may be inferred. The partial spatial coherence of the source, which may be fixed or variable, may advantageously provide for rejection of multiple scattering artifacts and thus improve image quality.
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