Invention Grant
US07644621B2 Capped and chambered pressure sensor 失效
带盖和腔室的压力传感器

Capped and chambered pressure sensor
Abstract:
The present invention relates to a pressure sensor. The pressure sensor includes a substrate assembly. The substrate assembly defines closed channels and includes a conductive layer. A conductive membrane extends from the substrate assembly and is spaced from the conductive layer. The conductive membrane defines a plurality of apertures. A cap extends from the substrate assembly to cover the membrane.
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