Invention Grant
- Patent Title: Transport apparatus, control method for the same, and vacuum processing system
- Patent Title (中): 运输设备,控制方法及真空处理系统
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Application No.: US11167584Application Date: 2005-06-28
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Publication No.: US07645112B2Publication Date: 2010-01-12
- Inventor: Hirofumi Minami , Kenji Ago , Takafumi Kawaguchi , Toshio Koike , Junpei Yuyama
- Applicant: Hirofumi Minami , Kenji Ago , Takafumi Kawaguchi , Toshio Koike , Junpei Yuyama
- Applicant Address: JP Chigasaki-shi
- Assignee: Ulvac Inc.
- Current Assignee: Ulvac Inc.
- Current Assignee Address: JP Chigasaki-shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2004-191946 20040629
- Main IPC: B66C23/00
- IPC: B66C23/00

Abstract:
A transport apparatus which can properly transmit a rotary driving force of a rotating motor to a transport arm and can correctly detect an angle of rotation of a rotary driving shaft, thereby transporting an object to be transported in a transport unit to a correct position. The transport apparatus includes: a housing having an airtight structure; first to third driving shafts that are provided in the housing to be independently rotatable around a predetermined coaxial rotary shaft; permanent magnets arranged at predetermined positions of the first to third driving shafts, respectively; and electromagnetic coils provided in the housing to correspond to the respective permanent magnets. Driving currents are supplied to the electromagnetic coils based on predetermined information, so as to move the first to third driving shafts. The object to be transported is transported by first and second linkages fixed to the first to third driving shafts.
Public/Granted literature
- US20050286993A1 Transport apparatus, control method for the same, and vacuum processing system Public/Granted day:2005-12-29
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