Invention Grant
- Patent Title: Chemical mechanical polishing pad manufacturing assembly
- Patent Title (中): 化学机械抛光垫制造总成
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Application No.: US12175965Application Date: 2008-07-18
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Publication No.: US07645186B1Publication Date: 2010-01-12
- Inventor: Michelle Jensen , John Gifford Nowland , Brenda Harding , Carol Corder
- Applicant: Michelle Jensen , John Gifford Nowland , Brenda Harding , Carol Corder
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent Thomas S. Deibert
- Main IPC: B24D11/00
- IPC: B24D11/00

Abstract:
A chemical mechanical polishing pad manufacturing assembly is provided having a subpad layer having a top surface and a bottom surface; a backing plate having a top side and a bottom side; a sacrificial layer having at least two recessed areas designed to facilitate attachment of a subpad layer to the backing plate; wherein the subpad layer is disposed on the top side of the backing plate and the sacrificial layer is disposed on the bottom side of the backing plate, and wherein the at least two wrap around tabs extend to the bottom side of the backing plate. Also provide is a method of manufacturing a chemical mechanical polishing pad using the chemical mechanical polishing pad manufacturing assembly.
Public/Granted literature
- US20100015902A1 CHEMICAL MECHANICAL POLISHING PAD MANUFACTURING ASSEMBLY Public/Granted day:2010-01-21
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