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US07645411B2 Imprinting apparatus and method 失效
压印装置和方法

Imprinting apparatus and method
Abstract:
An imprinting apparatus, for transferring a microstructure of a mold onto a forming material by pressing and mold-releasing, includes a plurality of driving devices which relatively move the mold the forming material to each other along an axis of a pressing direction, wherein the plurality of driving devices make different relative moving speeds of the mold and the forming material during the relative motion.
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