Invention Grant
- Patent Title: Imprinting apparatus and method
- Patent Title (中): 压印装置和方法
-
Application No.: US11600187Application Date: 2006-11-16
-
Publication No.: US07645411B2Publication Date: 2010-01-12
- Inventor: Hiroshi Miyakoshi
- Applicant: Hiroshi Miyakoshi
- Applicant Address: JP Tokyo
- Assignee: Konica Minolta Holdings, Inc.
- Current Assignee: Konica Minolta Holdings, Inc.
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2005-336844 20051122; JP2006-266238 20060929
- Main IPC: B28B3/06
- IPC: B28B3/06 ; B29C59/00 ; H01L27/00 ; B30B15/20

Abstract:
An imprinting apparatus, for transferring a microstructure of a mold onto a forming material by pressing and mold-releasing, includes a plurality of driving devices which relatively move the mold the forming material to each other along an axis of a pressing direction, wherein the plurality of driving devices make different relative moving speeds of the mold and the forming material during the relative motion.
Public/Granted literature
- US20070114696A1 Imprinting apparatus and method Public/Granted day:2007-05-24
Information query
IPC分类: