Invention Grant
US07645619B2 Magnetic random access memory device and method of forming the same
有权
磁性随机存取存储器件及其形成方法
- Patent Title: Magnetic random access memory device and method of forming the same
- Patent Title (中): 磁性随机存取存储器件及其形成方法
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Application No.: US12073098Application Date: 2008-02-29
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Publication No.: US07645619B2Publication Date: 2010-01-12
- Inventor: Se-Chung Oh , Jang-Eun Lee , Jun-Soo Bae , Hyun-Jo Kim , Kyung-Tae Nam , Young-Ki Ha
- Applicant: Se-Chung Oh , Jang-Eun Lee , Jun-Soo Bae , Hyun-Jo Kim , Kyung-Tae Nam , Young-Ki Ha
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR2005-11294 20050207
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Example embodiments of the present invention disclose a semiconductor memory device and a method of forming a memory device. A semiconductor memory device may include a digit line disposed on a substrate, an intermediate insulating layer covering the digit line, a magnetic tunnel junction (MTJ) pattern disposed on the intermediate insulating layer and over the digit line, the MTJ pattern including a sequentially stacked lower magnetic pattern, upper magnetic pattern, and capping pattern, wherein the capping pattern does not react with the upper magnetic pattern at a temperature above about 280° C., and a bit line connected to the capping pattern and disposed to intersect the digit line. A method of forming a semiconductor memory device may include forming a digit line on a substrate, forming an intermediate insulating layer covering the digit line, forming a magnetic tunnel junction (MTJ) pattern on the intermediate insulating layer, the MTJ pattern including a sequentially stacked lower magnetic pattern, upper magnetic pattern, and capping pattern, wherein the capping pattern does not react with the upper magnetic pattern at a temperature above about 280° C., performing an annealing operation at a temperature of about 350° C. or higher, and forming a bit line connected to the capping pattern and disposed to intersect the digit line.
Public/Granted literature
- US20080153179A1 Magnetic random access memory device and method of forming the same Public/Granted day:2008-06-26
Information query
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