Invention Grant
US07646040B2 Boron phosphide-based compound semiconductor device, production method thereof and light emitting diode 失效
磷化磷基化合物半导体器件及其制造方法和发光二极管

  • Patent Title: Boron phosphide-based compound semiconductor device, production method thereof and light emitting diode
  • Patent Title (中): 磷化磷基化合物半导体器件及其制造方法和发光二极管
  • Application No.: US10535821
    Application Date: 2003-11-27
  • Publication No.: US07646040B2
    Publication Date: 2010-01-12
  • Inventor: Takashi Udagawa
  • Applicant: Takashi Udagawa
  • Applicant Address: JP Tokyo
  • Assignee: Showa Denko K.K.
  • Current Assignee: Showa Denko K.K.
  • Current Assignee Address: JP Tokyo
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2002-344828 20021128
  • International Application: PCT/JP03/15180 WO 20031127
  • International Announcement: WO2004/049451 WO 20040610
  • Main IPC: H01L33/00
  • IPC: H01L33/00 H01L29/205
Boron phosphide-based compound semiconductor device, production method thereof and light emitting diode
Abstract:
A boron phosphide-based semiconductor device having a junction structure of a Group-III nitride semiconductor layer and a boron phosphide layer with excellent device properties is provided. The boron phosphide-based compound semiconductor device has a heterojunction structure comprising a Group-III nitride semiconductor layer and a boron phosphide layer, wherein the surface of the Group-III nitride semiconductor layer has (0.0.0.1.) crystal plane, and the boron phosphide layer is a {111}-boron phosphide layer having a {111} crystal plane stacked on the (0.0.0.1.) crystal plane of the Group-III nitride semiconductor layer in parallel to the (0.0.0.1.) crystal plane.
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