Invention Grant
- Patent Title: Asymmetric membrane cMUT devices and fabrication methods
- Patent Title (中): 非对称膜cMUT器件及其制造方法
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Application No.: US11077841Application Date: 2005-03-11
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Publication No.: US07646133B2Publication Date: 2010-01-12
- Inventor: F. Levent Degertekin
- Applicant: F. Levent Degertekin
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Troutman Sanders LLP
- Agent Ryan A. Schneider; James H. Yancey, Jr.
- Main IPC: H02N2/00
- IPC: H02N2/00 ; A61B8/00 ; B06B1/06 ; H03K5/01

Abstract:
Asymmetric membrane capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
Public/Granted literature
- US20050203397A1 Asymetric membrane cMUT devices and fabrication methods Public/Granted day:2005-09-15
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