Invention Grant
US07646134B2 Small thin film-movable element, small thin film-movable element array and image forming apparatus 失效
小型薄膜可移动元件,小型薄膜可移动元件阵列和成像装置

Small thin film-movable element, small thin film-movable element array and image forming apparatus
Abstract:
A small thin film-movable element is provided and includes: a movable portion supported elastically deformably and capable of being displaced bidirectionally in one direction and a direction reverse thereto; a first drive source for applying a physical acting force to the movable portion, in which the movable portion produces a modulating or switching function by the first drive source; and a second drive source, which is different from the first drive source, for increasing or reducing an absolute value of the physical acting force to restrain a vibration of the movable portion in driving to displace the movable portion in a first direction by the first drive source.
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