Invention Grant
US07646134B2 Small thin film-movable element, small thin film-movable element array and image forming apparatus
失效
小型薄膜可移动元件,小型薄膜可移动元件阵列和成像装置
- Patent Title: Small thin film-movable element, small thin film-movable element array and image forming apparatus
- Patent Title (中): 小型薄膜可移动元件,小型薄膜可移动元件阵列和成像装置
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Application No.: US11482730Application Date: 2006-07-10
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Publication No.: US07646134B2Publication Date: 2010-01-12
- Inventor: Shinya Ogikubo , Hirochika Nakamura
- Applicant: Shinya Ogikubo , Hirochika Nakamura
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JPP2005-200367 20050708
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A small thin film-movable element is provided and includes: a movable portion supported elastically deformably and capable of being displaced bidirectionally in one direction and a direction reverse thereto; a first drive source for applying a physical acting force to the movable portion, in which the movable portion produces a modulating or switching function by the first drive source; and a second drive source, which is different from the first drive source, for increasing or reducing an absolute value of the physical acting force to restrain a vibration of the movable portion in driving to displace the movable portion in a first direction by the first drive source.
Public/Granted literature
- US20070007849A1 Small thin film-movable element, small thin film-movable element array and image forming apparatus Public/Granted day:2007-01-11
Information query
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