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US07646142B2 Field emission device (FED) having cathode aperture to improve electron beam focus and its method of manufacture 失效
具有阴极孔径以改善电子束聚焦的场发射器件(FED)及其制造方法

Field emission device (FED) having cathode aperture to improve electron beam focus and its method of manufacture
Abstract:
A Field Emission Device (FED) and its method of manufacture includes: forming a substrate; forming a cathode having a cathode aperture on an upper surface of the substrate; forming a material layer having a first through hole with a smaller diameter than that of the cathode aperture on an upper surface of the cathode; forming a first insulator having a first cavity on an upper surface of the material layer; forming a gate electrode having a second through hole on an upper surface of the first insulator; and forming an emitter in a central portion of the cathode aperture.
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