Invention Grant
- Patent Title: Apparatus and method for measuring the current consumption and the capacitance of a semiconductor device
- Patent Title (中): 用于测量半导体器件的电流消耗和电容的装置和方法
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Application No.: US11725556Application Date: 2007-03-20
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Publication No.: US07646206B2Publication Date: 2010-01-12
- Inventor: Frank C. Mielke
- Applicant: Frank C. Mielke
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Priority: DE102007009549 20070227
- Main IPC: G01R27/26
- IPC: G01R27/26
Abstract:
A measuring apparatus is provided which has least one voltage source for providing a supply voltage for a semiconductor device to be tested, at least one first tester channel connected to the supply voltage source via a first RC element having a first resistor and a first capacitor connected in series therewith, wherein the first tester channel is adapted for the temporally resolved measurement of a charging voltage of the first capacitor.
Public/Granted literature
- US20080204045A1 Apparatus and method for measuring the current consumption and the capacitance of a semiconductor device Public/Granted day:2008-08-28
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