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US07646441B2 Electro-optical display device having thin film transistors including a gate insulating film containing fluorine 失效
具有薄膜晶体管的电光显示器件包括含有氟的栅极绝缘膜

Electro-optical display device having thin film transistors including a gate insulating film containing fluorine
Abstract:
An electro-optical display device comprising a first substrate having an insulating surface, at least one thin film transistor formed over the first substrate, the thin film transistor comprising a channel region, source and drain regions with the channel region extending in between, a gate insulating film adjacent to the channel region, and a gate electrode adjacent to the gate insulating film, a pixel electrode formed over a leveling film or over an interlayer insulating film and electrically connected to one of the source and drain regions of the thin film transistor, and color filters or black stripes comprising a resin formed over a second substrate. A leveling film may be formed over the at least one thin film transistor, the color filters or the black stripes. The device may comprise a second leveling film or a common electrode.
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