Invention Grant
US07646478B2 Apparatus and method for examining spectral characteristics of transmitted light through an object 有权
用于检查通过物体的透射光的光谱特性的装置和方法

Apparatus and method for examining spectral characteristics of transmitted light through an object
Abstract:
An apparatus for examining spectral characteristics of an object may include a chuck configured to support and releasably fix the object, wherein the chuck is larger than the object, a first light source assembly integral with the chuck and configured to illuminate a bottom surface of the object with light having a predetermined spectrum and intensity, and a transmission analysis unit for collecting and analyzing light transmitted through the object. The first light source assembly may include multiple and/or adjustable light sources. A second light source assembly may illuminate a top surface of the object, and a reflection analysis unit may collect resultant reflected light.
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