Invention Grant
US07647697B2 Method of manufacturing nozzle plate, method of manufacturing liquid ejection head, and matrix structure for manufacturing nozzle plate
失效
制造喷嘴板的方法，液体喷射头的制造方法以及用于制造喷嘴板的基体结构
- Patent Title: Method of manufacturing nozzle plate, method of manufacturing liquid ejection head, and matrix structure for manufacturing nozzle plate
- Patent Title (中): 制造喷嘴板的方法，液体喷射头的制造方法以及用于制造喷嘴板的基体结构
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Application No.: US11510586Application Date: 2006-08-28
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Publication No.: US07647697B2Publication Date: 2010-01-19
- Inventor: Tsutomu Yokouchi
- Applicant: Tsutomu Yokouchi
- Applicant Address: JP Tokyo
- Assignee: Fujifilm Corporation
- Current Assignee: Fujifilm Corporation
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2005-247742 20050829
- Main IPC: B41J2/16
- IPC: B41J2/16
Abstract:
The method manufactures a nozzle plate, and comprises: a patterned resist formation step of forming a patterned resist on a flat surface of a matrix substrate, the patterned resist having a shape corresponding to a diameter of nozzle holes in a nozzle plate to be formed, the patterned resist having a thickness corresponding to a length of the nozzle holes; a nozzle length regulating member placement step of placing the nozzle length regulating member having a flat surface onto the patterned resist in such a manner that the flat surface of the nozzle length regulating member faces the flat surface of the matrix substrate across the patterned resist; and a nozzle plate formation step of forming the nozzle plate by plating with the patterned resist between the flat surface of the matrix substrate and the flat surface of the nozzle length regulating member.
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