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US07647822B2 Coaxial imaging for indentation instruments 失效
压痕仪的同轴成像

  • Patent Title: Coaxial imaging for indentation instruments
  • Patent Title (中): 压痕仪的同轴成像
  • Application No.: US11708302
    Application Date: 2007-02-20
  • Publication No.: US07647822B2
    Publication Date: 2010-01-19
  • Inventor: Wayne A Bonin
  • Applicant: Wayne A Bonin
  • Main IPC: G01B5/28
  • IPC: G01B5/28
Coaxial imaging for indentation instruments
Abstract:
Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.
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