Invention Grant
US07648894B2 Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same
有权
用于绝缘膜生产的涂料组合物,使用它的绝缘膜的制备方法,由其制备的半导体器件的绝缘膜和包含该半导体器件的半导体器件
- Patent Title: Coating composition for insulating film production, preparation method of insulation film by using the same, insulation film for semi-conductor device prepared therefrom, and semi-conductor device comprising the same
- Patent Title (中): 用于绝缘膜生产的涂料组合物,使用它的绝缘膜的制备方法,由其制备的半导体器件的绝缘膜和包含该半导体器件的半导体器件
-
Application No.: US12010541Application Date: 2008-01-25
-
Publication No.: US07648894B2Publication Date: 2010-01-19
- Inventor: Myung-Sun Moon , Min-Jin Ko , Hye-Yeong Nam , Jung-Won Kang , Bum-Gyu Choi , Byung-Ro Kim , Gwi-Gwon Kang , Young-Duk Kim , Sang-Min Park
- Applicant: Myung-Sun Moon , Min-Jin Ko , Hye-Yeong Nam , Jung-Won Kang , Bum-Gyu Choi , Byung-Ro Kim , Gwi-Gwon Kang , Young-Duk Kim , Sang-Min Park
- Applicant Address: KR Seoul
- Assignee: LG Chem, Ltd.
- Current Assignee: LG Chem, Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Priority: KR10-2003-0022307 20030409; WOPCT/KR2004/000747 20040331
- Main IPC: G12B21/02
- IPC: G12B21/02 ; H01L21/20 ; H01L21/36

Abstract:
The present invention relates to a coating composition for insulating film production, a preparation method of a low dielectric insulating film using the same, a low dielectric insulating film for a semiconductor device prepared therefrom, and a semiconductor device comprising the same, and more particularly to a coating composition for insulating film production having a low dielectric constant and that is capable of producing an insulating film with superior mechanical strength (elasticity), a preparation method of a low dielectric insulating film using the same, a low dielectric insulating film for a semiconductor device prepared therefrom, and a semiconductor device comprising the same. The coating composition of the present invention comprises an organic siloxane resin having a small molecular weight, and water, and significantly improves low dielectricity and mechanical strength of an insulating film.
Public/Granted literature
Information query