Invention Grant
- Patent Title: Methods of forming semiconductor constructions, and methods of recessing materials within openings
- Patent Title (中): 形成半导体结构的方法以及在开口内凹陷材料的方法
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Application No.: US11652863Application Date: 2007-01-12
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Publication No.: US07648915B2Publication Date: 2010-01-19
- Inventor: Larson Lindholm , Aaron R. Wilson , David K. Hwang
- Applicant: Larson Lindholm , Aaron R. Wilson , David K. Hwang
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
Some embodiments include methods of recessing multiple materials to a common depth utilizing etchant comprising C4F6 and C4F8. The recessed materials may be within isolation regions, and the recessing may be utilized to form trenches for receiving gatelines. Some embodiments include structures having an island of semiconductor material laterally surrounded by electrically insulative material. Two gatelines extend across the insulative material and across the island of semiconductor material. One of the gatelines is recessed deeper into the electrically insulative material than the other.
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