An apparatus including: a photodiode including: a first conductivity substrate; a second conductivity PD-well on the substrate's first surface side; and a first conductivity collection well inside the PD-well; a modulation transistor including: a second conductivity TR-well connected with the PD-well, and a junction depth shallower than that of the PD-well; a first conductivity modulation well inside the TR-well, and connected with the collection well; a second conductivity source inside the modulation well, and including a region contacting the first surface; a gate electrode in a region partially covering the modulation well and enclosing the source; a gate insulation layer between the gate and the first surface; and a second conductivity drain partially sandwiching the gate and opposing the source, and including a region contacting the first surface; and a transfer transistor connected to modulation transistors in pixels between the source and a connected source line.