Invention Grant
- Patent Title: LPP type extreme ultra violet light source apparatus and driver laser for the same
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Application No.: US11783387Application Date: 2007-04-09
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Publication No.: US07649188B2Publication Date: 2010-01-19
- Inventor: Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
- Applicant: Akira Endo , Tatsuya Ariga , Takashi Suganuma , Taisuke Miura
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Komatsu Ltd.,Gigaphoton Inc.
- Current Assignee: Komatsu Ltd.,Gigaphoton Inc.
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2004-295272 20041007; JP2005-230619 20050809
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated CO2 laser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated CO2 laser oscillator and amplifies the input laser beam to output the amplified laser beam.
Public/Granted literature
- US20070187628A1 LPP type extreme ultra violet light source apparatus and driver laser for the same Public/Granted day:2007-08-16
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