Invention Grant
- Patent Title: Active damping device for a positioning stage
- Patent Title (中): 用于定位平台的主动阻尼装置
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Application No.: US11623171Application Date: 2007-01-15
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Publication No.: US07649333B2Publication Date: 2010-01-19
- Inventor: Ping Kong Joseph Choy , Siu Wing Or , Chung Sheung Yung , Chou Kee Peter Liu , Lai Wa Helen Chan-Wong
- Applicant: Ping Kong Joseph Choy , Siu Wing Or , Chung Sheung Yung , Chou Kee Peter Liu , Lai Wa Helen Chan-Wong
- Applicant Address: HK Hong Kong
- Assignee: ASM Assembly Automation Ltd.
- Current Assignee: ASM Assembly Automation Ltd.
- Current Assignee Address: HK Hong Kong
- Agency: Ostrolenk Faber LLP
- Main IPC: G05B5/01
- IPC: G05B5/01
Abstract:
A damping apparatus is provided for a positioning stage that is operative to move and position an object along a motion axis. The damping apparatus comprises a motion transformation device operative to rotate the positioning stage about a rotary axis that is substantially perpendicular to the motion axis, in response to forces generated to the positioning stage during acceleration or deceleration thereof. Resilient elements connected to the positioning stage serve to reduce transmission of vibration generated from the positioning stage.
Public/Granted literature
- US20080169781A1 ACTIVE DAMPING DEVICE FOR A POSITIONING STAGE Public/Granted day:2008-07-17
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