Invention Grant
- Patent Title: Evaluation method of probe mark of probe needle of probe card using imaginary electrode pad and designated determination frame
- Patent Title (中): 使用假电极垫和指定的确定框的探针卡探头针的探针标记的评估方法
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Application No.: US11408158Application Date: 2006-04-21
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Publication No.: US07649370B2Publication Date: 2010-01-19
- Inventor: Yoshihiko Endou , Yoshikazu Arisaka , Tatsuya Miyazaki
- Applicant: Yoshihiko Endou , Yoshikazu Arisaka , Tatsuya Miyazaki
- Applicant Address: JP Tokyo
- Assignee: Fujitsu Microelectronics Limited
- Current Assignee: Fujitsu Microelectronics Limited
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2006-014228 20060123
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
An evaluation method of a probe mark of a probe needle of a probe card, includes the steps of: forming the probe mark of the probe needle on a probe mark evaluation wafer; recognizing the probe mark with imaging; and overlapping an imaginary electrode pad with the probe mark recognized by imaging so that the probe mark is evaluated.
Public/Granted literature
- US20070170937A1 Evaluation method of probe mark of probe needle of probe card Public/Granted day:2007-07-26
Information query
