Invention Grant
US07649581B2 Array substrate of an LCD comprising first and second gate insulating layers and method of fabricating the same 有权
包括第一和第二栅极绝缘层的LCD的阵列衬底及其制造方法

Array substrate of an LCD comprising first and second gate insulating layers and method of fabricating the same
Abstract:
Disclosed is an array substrate of an LCD, and a method for fabricating it, which simplifies the fabrication process, thereby reducing fabrication costs. The process is simplified because the array substrate does not have a passivation film. The thin film transistors on the array substrate each have an active layer that is protected from contamination by forming a channel insulation layer on the active layer through a dry-etching process. Further, the gate line, gate pad, and gate electrode may have a two-layer structure having a low-resistance metal layer and a barrier metal layer, or a three-layer structure having a low-resistance metal layer and two barrier metal layers.
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