Invention Grant
US07649583B2 Semiconductor structure and fabricating method thereof for liquid crystal display device 有权
液晶显示装置的半导体结构及其制造方法

Semiconductor structure and fabricating method thereof for liquid crystal display device
Abstract:
A method for fabricating a semiconductor structure with a multi-layer storage capacitor is provided. A substrate having an active element area and a storage capacitor area is provided. By sequentially fabricating a semiconductor layer, a first inter-layer dielectric (ILD) layer, a gate and a first electrode, a source and a drain in the semiconductor layer in the active element area, a second ILD layer, a patterned conductive layer served as a pixel electrode, a patterned third ILD layer, a plurality of contact windows in the first, second and third ILD layers for exposing the source, the drain, parts of the patterned conductive layer and the first electrode, a second electrode and a source/drain conductive line, the semiconductor structure with the multi-layer storage is obtained in consequence.
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