Invention Grant
- Patent Title: Characterization of micro- and nano scale materials by acoustic wave generation with a CW modulated laser
- Patent Title (中): 通过CW调制激光产生声波来表征微米和纳米级材料
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Application No.: US10593655Application Date: 2005-03-23
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Publication No.: US07649632B2Publication Date: 2010-01-19
- Inventor: Todd W. Murray
- Applicant: Todd W. Murray
- Applicant Address: US MA Boston
- Assignee: The Trustees of Boston University
- Current Assignee: The Trustees of Boston University
- Current Assignee Address: US MA Boston
- Agency: Weingarten, Schurgin, Gagnebin & Lebovici LLP
- International Application: PCT/US2005/009726 WO 20050323
- International Announcement: WO2005/094503 WO 20051013
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
Apparatus for analyzing thin surface layers. An acoustic wave generating laser beam is amplitude modulated with continuous wave modulation of a frequency in the megahertz to gigahertz range and an optical system directs the modulated radiation to a surface of a thin surface layer. This in turn causes an acoustic wave that is sensed and analyzed to provide an indication of properties of thin surface layer.
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