Invention Grant
- Patent Title: Micromirror device with a single address electrode
- Patent Title (中): 具有单个地址电极的微镜器件
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Application No.: US12072451Application Date: 2008-02-25
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Publication No.: US07649673B2Publication Date: 2010-01-19
- Inventor: Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- Applicant: Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- Applicant Address: JP JP
- Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- Current Assignee Address: JP JP
- Agent Bo-In Lin
- Main IPC: G09G3/34
- IPC: G09G3/34 ; G02B26/00
Abstract:
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting any each of the mirrors to be deflectable in a plurality of directions, an electrode arranged to face the mirror, and a driving circuit, which is connected to the mirror via the elastic hinge, for applying to the mirror an address voltage for independently controlling the deflection of the mirror.
Public/Granted literature
- US20080218830A1 Micromirror device with a single address electrode Public/Granted day:2008-09-11
Information query
IPC分类:
