Invention Grant
- Patent Title: Acceleration sensor
- Patent Title (中): 加速度传感器
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Application No.: US11306207Application Date: 2005-12-20
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Publication No.: US07650787B2Publication Date: 2010-01-26
- Inventor: Yoshihiko Ino
- Applicant: Yoshihiko Ino
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Rabin & Berdo, P.C.
- Priority: JP2004-367933 20041220
- Main IPC: G01P15/12
- IPC: G01P15/12
Abstract:
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fixed portion and the plummet portion, the thickness of the beam portion being thinner than the thickness of the fixed portion. The case has a cavity housing the semiconductor acceleration sensor chip, and a projection portion formed on the bottom face of the cavity, the bottom face of the fixed portion being fixed to the top face of the projection portion.
Public/Granted literature
- US20060196270A1 Acceleration sensor Public/Granted day:2006-09-07
Information query
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