Invention Grant
- Patent Title: Fluid controller
- Patent Title (中): 流体控制器
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Application No.: US11661506Application Date: 2005-08-31
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Publication No.: US07650903B2Publication Date: 2010-01-26
- Inventor: Takashi Yamamoto
- Applicant: Takashi Yamamoto
- Applicant Address: JP Nobeoka
- Assignee: Asahi Organic Chemicals Industry Co., Ltd.
- Current Assignee: Asahi Organic Chemicals Industry Co., Ltd.
- Current Assignee Address: JP Nobeoka
- Agency: Jordan and Hamburg LLP
- Priority: JP2004-253501 20040831
- International Application: PCT/JP2005/015943 WO 20050831
- International Announcement: WO2006/025467 WO 20060309
- Main IPC: F16K31/128
- IPC: F16K31/128

Abstract:
A fluid controller that allows facilitated installment, piping and wiring connection to semiconductor manufacturing equipment and does not corrode even when a corrosive fluid is used, includes a flowmeter sensor section having a first ultrasonic transducer which transmits ultrasonic waves in a fluid and a second ultrasonic transducer which receives the ultrasonic waves transmitted from the first ultrasonic transducer and outputs the signal thereof to a flowmeter amp section. An adjustment valve that adjusts the flow rate of the fluid using operation pressure is provided, and at least the flowmeter sensor section and the adjustment valve are connected to and disposed in a casing having a fluid inlet and a fluid outlet.
Public/Granted literature
- US20080294293A1 Fluid Controller Public/Granted day:2008-11-27
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