Invention Grant
US07651022B2 Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
有权
使用引线接合机形成用于半导体互连的凸块的方法和装置
- Patent Title: Method and apparatus for forming bumps for semiconductor interconnections using a wire bonding machine
- Patent Title (中): 使用引线接合机形成用于半导体互连的凸块的方法和装置
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Application No.: US11733868Application Date: 2007-04-11
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Publication No.: US07651022B2Publication Date: 2010-01-26
- Inventor: Stephen Babinetz , Takashi Tsujimura , Hiroyuki Ohtsubo , Yasuhiro Morimoto
- Applicant: Stephen Babinetz , Takashi Tsujimura , Hiroyuki Ohtsubo , Yasuhiro Morimoto
- Applicant Address: US PA Fort Washington
- Assignee: Kulicke and Soffa Industries, Inc.
- Current Assignee: Kulicke and Soffa Industries, Inc.
- Current Assignee Address: US PA Fort Washington
- Agent Christopher M. Spietzer, Sr.
- Main IPC: B23K31/02
- IPC: B23K31/02 ; H01L23/49

Abstract:
The present invention is a method and apparatus for forming a bump for semiconductor interconnect applications, such as reverse wire bonding or stud bumping for flip chip interconnections. The bump is formed by (1) ball bonding at the bump site, (2) raising the capillary a predetermined height after forming the ball bond with the wire paying out of the capillary tip, (3) moving the capillary laterally a predetermined distance, preferably in a direction toward the site of other end of the wire loop, if the bump is to be used as the platform for a stitch bond of a wire loop, (4) raising the capillary further, and (5) moving the capillary diagonally downwardly and in the opposite direction of the first lateral motion. The wire is then severed by raising the capillary, closing the clamps and raising the capillary again to snap the wire pigtail off at the bump.
Public/Granted literature
- US20070199974A1 METHOD AND APPARATUS FOR FORMING BUMPS FOR SEMICONDUCTOR INTERCONNECTIONS USING A WIRE BONDING MACHINE Public/Granted day:2007-08-30
Information query
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