Invention Grant
US07651079B2 Substrate support plate transfer apparatus for fabricating organic light emitting display 有权
用于制造有机发光显示器的基板支撑板传送装置

Substrate support plate transfer apparatus for fabricating organic light emitting display
Abstract:
A substrate support plate transfer apparatus for fabricating an organic light emitting display is disclosed. In one embodiment, the apparatus includes a quartz plate transferred into a bonding processing chamber for an organic light emitting device, a protection frame on which the quartz plate is placed in order to transfer the quartz plate into the chamber, and a frame-shaped supporting plate including a sliding transfer device for helping the transfer of the protection frame and installed in the chamber. The quartz plate has a rigidity capable of enduring pressure in the bonding process applied to a large sized substrate, and the apparatus provides for convenient replacement of the quartz plate.
Information query
Patent Agency Ranking
0/0