Invention Grant
US07651237B2 System and method for reticle illumination 有权
光罩照明的系统和方法

  • Patent Title: System and method for reticle illumination
  • Patent Title (中): 光罩照明的系统和方法
  • Application No.: US11706814
    Application Date: 2007-02-14
  • Publication No.: US07651237B2
    Publication Date: 2010-01-26
  • Inventor: Conrad Stenton
  • Applicant: Conrad Stenton
  • Applicant Address: US MA Waltham
  • Assignee: Raytheon Company
  • Current Assignee: Raytheon Company
  • Current Assignee Address: US MA Waltham
  • Agent H. St. Julian, Esq.
  • Main IPC: F21G1/34
  • IPC: F21G1/34 F21V7/04
System and method for reticle illumination
Abstract:
A reticle illumination system. The novel system includes a first light source adapted to output light toward a target surface and a material having a predetermined index of refraction disposed between the first light source and the target surface for coupling light from the first light source to the target surface. In an illustrative embodiment, the material is a glue or epoxy having an index of refraction matching that of the target surface, and the target surface is a prism surface upon which a reticle is disposed. The system also includes a second light source adapted to output light into the material such that the light is reflected and scattered off of an exit end of the fiber, and/or off of scattering centers distributed throughout the material, towards the target surface.
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