Invention Grant
- Patent Title: Temperature probes having a thermally isolated tip
- Patent Title (中): 具有热隔离尖端的温度探头
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Application No.: US11826941Application Date: 2007-07-19
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Publication No.: US07651269B2Publication Date: 2010-01-26
- Inventor: Keith Comendant
- Applicant: Keith Comendant
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: G01K1/00
- IPC: G01K1/00 ; G01K11/20 ; G01K7/00 ; G01K13/00

Abstract:
Temperature probes for measuring the temperature of objects are disclosed. The temperature probes include a housing and a tip in thermal contact with an end of the housing. The tip is adapted to contact a surface of the object whose temperature is to be measured by the temperature probe. A portion of the housing in contact with the tip has a high thermal resistance effective to thermally isolate the tip from an adjacent portion of the housing. A sensor is located inside of the housing and adapted to measure the temperature of the tip.
Public/Granted literature
- US20090022205A1 Temperature probes having a thermally isolated tip Public/Granted day:2009-01-22
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