Invention Grant
- Patent Title: Automated x-ray optic alignment with four-sector sensor
- Patent Title (中): 自动X射线光学对准四扇区传感器
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Application No.: US11848700Application Date: 2007-08-31
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Publication No.: US07651270B2Publication Date: 2010-01-26
- Inventor: Bonglea Kim
- Applicant: Bonglea Kim
- Applicant Address: US MI Auburn Hills
- Assignee: Rigaku Innovative Technologies, Inc.
- Current Assignee: Rigaku Innovative Technologies, Inc.
- Current Assignee Address: US MI Auburn Hills
- Agency: Brinks Hofer Gilson & Lione
- Main IPC: A61B6/08
- IPC: A61B6/08

Abstract:
A system for x-ray optical alignment. The system includes an x-ray source, an optic, a collimation element, and alignment sensors. The x-ray source generates an x-ray beam that is directed by the optic at a sample. The collimation element is located between the optic and the sample to define the profile of the x-ray beam. The sensors receive the x-ray beam from the optic and generated signal indicative of the system alignment. The sensors may be located on a surface of the collimation element facing the optic. The inner edge of the sensors may be located at equal intervals radially about the collimation element and may form an aperture having a symmetric shape.
Public/Granted literature
- US20090060144A1 AUTOMATED X-RAY OPTIC ALIGNMENT WITH FOUR-SECTOR SENSOR Public/Granted day:2009-03-05
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