Invention Grant
- Patent Title: Method of producing fluorite crystal, fluorite and optical system incorporating the same
- Patent Title (中): 产生萤石晶体，萤石和掺入其的光学系统的方法
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Application No.: US11358103Application Date: 2006-02-22
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Publication No.: US07651861B2Publication Date: 2010-01-26
- Inventor: Kenji Ookubo
- Applicant: Kenji Ookubo
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2001/205469 20010705
- Main IPC: G01N33/00
- IPC: G01N33/00
Abstract:
There is provided a method of forming a fluorite crystal and an exposure apparatus including this fluorite crystal. A method of manufacturing a device using the exposure apparatus is also provided.
Public/Granted literature
- US20060153263A1 Method of producing fluorite crystal, fluorite and optical system incorporating the same Public/Granted day:2006-07-13
Information query
